Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane

Eui Hyeok Yang, Yoshikazu Hishinuma, Jian Gong Cheng, Susan Trolier-Mckinstry, Eric Bloemhof, B. Martin Levine

Research output: Contribution to journalArticlepeer-review

45 Scopus citations

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Engineering & Materials Science