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Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation
Christopher Y. Cheng, Ajay Dangi, Liqiang Ren, Sudhanshu Tiwari, Robert R. Benoit, Yongqiang Qiu, Holly S. Lay, Sumit Agrawal, Rudra Pratap, Sri Rajasekhar Kothapalli, Thomas E. Mallouk, Sandy Cochran, Susan Trolier-Mckinstry
Research output: Contribution to journal › Article › peer-review
25
Scopus
citations