Thin film stress from nonspherical substrate bending measurements

Keyphrases

• Non-spherical 100%
• Thin Film Stress 100%
• Substrate Bending 100%
• Bending Measurement 100%
• Deposition Stress 100%
• Wafer 66%
• Large Deflection 66%
• Thin Film Deposition 33%
• Direct Current 33%
• Deposition Conditions 33%
• Substrate Material 33%
• Film Materials 33%
• Magnetron 33%
• Out-of-plane Deflection 33%
• Nonlinear Bending 33%
• Nonlinear Theory 33%
• Algebraic Solution 33%
• Small Deflection 33%
• Ta Films 33%
• Ellipsoidal Surface 33%
• Bending Model 33%

Engineering

• Thin Films 100%
• Limitations 50%
• Polycarbonate 50%
• Direct Current 50%
• Magnetron 50%
• Deposition Condition 50%
• Substrate Material 50%
• Film Material 50%
• Nonlinear Theory 50%

Material Science

• Film 100%
• Thin Films 100%
• Polycarbonate 33%
• Thin Film Deposition 33%