Three-dimensional depth profiling of molecular structures

A. Wucher, J. Cheng, L. Zheng, N. Winograd

Research output: Contribution to journalArticlepeer-review

43 Scopus citations


Molecular time of flight secondary ion mass spectrometry (ToF-SIMS) imaging and cluster ion beam erosion are combined to perform a three-dimensional chemical analysis of molecular films. The resulting dataset allows a number of artifacts inherent in sputter depth profiling to be assessed. These artifacts arise from lateral inhomogeneities of either the erosion rate or the sample itself. Using a test structure based on a trehalose film deposited on Si, we demonstrate that the "local" depth resolution may approach values which are close to the physical limit introduced by the information depth of the (static) ToF-SIMS method itself.

Original languageEnglish (US)
Pages (from-to)1835-1842
Number of pages8
JournalAnalytical and Bioanalytical Chemistry
Issue number8
StatePublished - Apr 2009

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Biochemistry


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