Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography

X. Y. Zhong; B. Kabius; D. K. Schreiber; J. A. Eastman; D. D. Fong; A. K. Petford-Long

doi:10.1063/1.3690861

Three-dimensional quantitative chemical roughness of buried ZrO ₂/In ₂O ₃ interfaces via energy-filtered electron tomography

X. Y. Zhong
, B. Kabius
, D. K. Schreiber
, J. A. Eastman
, D. D. Fong
, A. K. Petford-Long

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO ₂/In ₂O ₃ multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO ₂/In ₂O ₃ interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO ₂/In ₂O ₃ heterostructure that has potential to exhibit mixed conduction behavior.

Original language	English (US)
Article number	101604
Journal	Applied Physics Letters
Volume	100
Issue number	10
DOIs	https://doi.org/10.1063/1.3690861
State	Published - Mar 5 2012

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.3690861

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@article{b17b55d8b69d45e0bd13b722610ff77a,

title = "Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography",

abstract = "The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO 2/In 2O 3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO 2/In 2O 3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO 2/In 2O 3 heterostructure that has potential to exhibit mixed conduction behavior.",

author = "Zhong, \{X. Y.\} and B. Kabius and Schreiber, \{D. K.\} and Eastman, \{J. A.\} and Fong, \{D. D.\} and Petford-Long, \{A. K.\}",

note = "Funding Information: This research was supported by the U.S. Department of Energy, BES-Materials Sciences under Contact No. 58931 and 58932, NSFC (Grant No. 51001064) the Innovation Method Program (Grant No. 2010IM031300), the National Basic Research Program of China (Grant No. 2009CB623701), and Specialized Research Fund for the Doctoral Program of Higher Education of China. This work was accomplished at the Electron Microscopy Center for Materials Research at Argonne National Laboratory, a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC. The help of Dr. Yuzi Liu and Jon Hiller at Argonne National Laboratory and Dr. Fang Lin at South China Agricultural University is gratefully acknowledged.",

year = "2012",

month = mar,

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doi = "10.1063/1.3690861",

language = "English (US)",

volume = "100",

journal = "Applied Physics Letters",

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T1 - Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography

AU - Zhong, X. Y.

AU - Kabius, B.

AU - Schreiber, D. K.

AU - Eastman, J. A.

AU - Fong, D. D.

AU - Petford-Long, A. K.

N1 - Funding Information: This research was supported by the U.S. Department of Energy, BES-Materials Sciences under Contact No. 58931 and 58932, NSFC (Grant No. 51001064) the Innovation Method Program (Grant No. 2010IM031300), the National Basic Research Program of China (Grant No. 2009CB623701), and Specialized Research Fund for the Doctoral Program of Higher Education of China. This work was accomplished at the Electron Microscopy Center for Materials Research at Argonne National Laboratory, a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC. The help of Dr. Yuzi Liu and Jon Hiller at Argonne National Laboratory and Dr. Fang Lin at South China Agricultural University is gratefully acknowledged.

PY - 2012/3/5

Y1 - 2012/3/5

N2 - The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO 2/In 2O 3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO 2/In 2O 3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO 2/In 2O 3 heterostructure that has potential to exhibit mixed conduction behavior.

AB - The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO 2/In 2O 3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO 2/In 2O 3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO 2/In 2O 3 heterostructure that has potential to exhibit mixed conduction behavior.

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ER -

Three-dimensional quantitative chemical roughness of buried ZrO ₂/In ₂O ₃ interfaces via energy-filtered electron tomography

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