@inproceedings{cb255821383347308ca2cb10b0ea1dfb,
title = "Toward a more quantitative evaluation for nano-scaled thin film system with scanning acoustic microscopy",
abstract = "Scanning acoustic microscopy (SAM) was employed to characterize 100 nm thin films of platinum on substrates with two different means of surface preparation. The well-known technique of V(z) was used to estimate the surface acoustic velocity which was found to differ between the two surface preparations. The thin films were also subjected to destructive tests, which also showed differences. The results suggest potential application to characterize adhesion properties of thin films.",
author = "Tittmann, {B. R.} and C. Miyasaka and C. Ishiyama and Park, {I. Kc}",
year = "2012",
doi = "10.1063/1.4716306",
language = "English (US)",
isbn = "9780735410138",
series = "AIP Conference Proceedings",
number = "31",
pages = "793--797",
booktitle = "Review of Progress in Quantitative Nondestructive Evaluation",
edition = "31",
note = "38th Annual Review of Progress in Quantitative Nondestructive Evaluation, QNDE ; Conference date: 17-07-2011 Through 22-07-2011",
}