@inproceedings{b871996452bd457bacfc6b44012fe6f0,
title = "Toward Blazed UV Gratings for the Habitable Worlds Observatory and Beyond",
abstract = "The Habitable Worlds Observatory (HWO) and other future missions require advancements in component technologies to achieve their science objectives. We discuss here several techniques developed through the Strategic Astrophysics Technologies program to manufacture blazed gratings for ultraviolet (UV) spectroscopy. Prototype gratings fabricated with electron-beam lithography (EBL) and KOH etching have shown peak-order groove efficiencies in excess of 65\% across the far and extreme UV. While efforts continue to further optimize EBL and KOH-etch processes for UV applications, development has begun on two additional fabrication techniques to produce blazed UV gratings: EBL paired with ion-beam etching, and thermally activated selective topography equilibration. We provide an overview of each fabrication technique, review recent performance measurements, and discuss the path toward developing blazed UV gratings for HWO and beyond.",
author = "Miles, \{Drew M.\} and Jake McCoy and Fabien Gris{\'e} and McEntaffer, \{Randall L.\}",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE. All rights reserved.; 12th UV/Optical/IR Space Telescopes and Instruments: Innovative Technologies and Concepts ; Conference date: 03-08-2025 Through 05-08-2025",
year = "2025",
month = sep,
day = "18",
doi = "10.1117/12.3063905",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Arenberg, \{Jonathan W.\} and Stahl, \{H. Philip\}",
booktitle = "UV/Optical/IR Space Telescopes and Instruments",
address = "United States",
}