Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

Maximilian Haider; Harald Rose; Stephan Uhlemann; Bernd Kabius; Knut Urban

doi:10.1093/oxfordjournals.jmicro.a023610

Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

Maximilian Haider
, Harald Rose
, Stephan Uhlemann
, Bernd Kabius
, Knut Urban

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

187 Scopus citations

Abstract

A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO₂ interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.

Original language	English (US)
Pages (from-to)	395-405
Number of pages	11
Journal	Journal of Electron Microscopy
Volume	47
Issue number	5
DOIs	https://doi.org/10.1093/oxfordjournals.jmicro.a023610
State	Published - 1998

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1093/oxfordjournals.jmicro.a023610

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title = "Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope",

abstract = "A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.",

author = "Maximilian Haider and Harald Rose and Stephan Uhlemann and Bernd Kabius and Knut Urban",

note = "Funding Information: we thank the Volkswagen-Stiftung for funding this project. Its realization would not have been possible without the continuous support of i. t\textasciicircum{}so{"}' l°T{"}w\textasciicircum{}-GeneialofEMBL.andofJ.Treuschchairman oftheBoard oftheResearch Centre JOlich. Thanks aredueto the members of the workshops at EMBL, to H. wittmann for technical assistance and to J. Zach for numerous helpful discussions. Support JT?dedby,PhUipsElectron°pticsIFT\textasciicircum{}V\textasciicircum{}T\textasciicircum{}f\textasciicircum{} S{"} CoSi2 samples were generously provided by S. Mantl, F. Klinkhammer and s. Meesters.",

year = "1998",

doi = "10.1093/oxfordjournals.jmicro.a023610",

language = "English (US)",

volume = "47",

pages = "395--405",

journal = "Journal of Electron Microscopy",

issn = "0022-0744",

publisher = "Japanese Society of Microscopy",

number = "5",

}

TY - JOUR

T1 - Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

AU - Haider, Maximilian

AU - Rose, Harald

AU - Uhlemann, Stephan

AU - Kabius, Bernd

AU - Urban, Knut

N1 - Funding Information: we thank the Volkswagen-Stiftung for funding this project. Its realization would not have been possible without the continuous support of i. t^so"' l°T"w^-GeneialofEMBL.andofJ.Treuschchairman oftheBoard oftheResearch Centre JOlich. Thanks aredueto the members of the workshops at EMBL, to H. wittmann for technical assistance and to J. Zach for numerous helpful discussions. Support JT?dedby,PhUipsElectron°pticsIFT^V^T^f^ S" CoSi2 samples were generously provided by S. Mantl, F. Klinkhammer and s. Meesters.

PY - 1998

Y1 - 1998

N2 - A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.

AB - A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.

UR - https://www.scopus.com/pages/publications/0031797093

UR - https://www.scopus.com/pages/publications/0031797093#tab=citedBy

U2 - 10.1093/oxfordjournals.jmicro.a023610

DO - 10.1093/oxfordjournals.jmicro.a023610

M3 - Article

AN - SCOPUS:0031797093

SN - 0022-0744

VL - 47

SP - 395

EP - 405

JO - Journal of Electron Microscopy

JF - Journal of Electron Microscopy

IS - 5

ER -

Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

Abstract

All Science Journal Classification (ASJC) codes

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