@article{9fecf6af9fc44233b31b5f5b578a3454,
title = "Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope",
abstract = "A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.",
author = "Maximilian Haider and Harald Rose and Stephan Uhlemann and Bernd Kabius and Knut Urban",
note = "Funding Information: we thank the Volkswagen-Stiftung for funding this project. Its realization would not have been possible without the continuous support of i. t\textasciicircum{}so{"}' l°T{"}w\textasciicircum{}-GeneialofEMBL.andofJ.Treuschchairman oftheBoard oftheResearch Centre JOlich. Thanks aredueto the members of the workshops at EMBL, to H. wittmann for technical assistance and to J. Zach for numerous helpful discussions. Support JT?dedby,PhUipsElectron°pticsIFT\textasciicircum{}V\textasciicircum{}T\textasciicircum{}f\textasciicircum{} S{"} CoSi2 samples were generously provided by S. Mantl, F. Klinkhammer and s. Meesters.",
year = "1998",
doi = "10.1093/oxfordjournals.jmicro.a023610",
language = "English (US)",
volume = "47",
pages = "395--405",
journal = "Journal of Electron Microscopy",
issn = "0022-0744",
publisher = "Oxford University Press",
number = "5",
}