Transport optics for a space-charge broadening ion beam

Geoffrey P. Malafsky; Nicholas Winograd

doi:10.1063/1.1139712

Transport optics for a space-charge broadening ion beam

Geoffrey P. Malafsky
, Nicholas Winograd

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The design and performance of a low-energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 μA beam of Ar⁺ ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space-charge diverging beam along the 44-cm path to the target. The ion optics have been optimized by the use of a new simulation program, chden, which can model a series of lenses and the effects of space-charge forces.

Original language	English (US)
Pages (from-to)	1294-1302
Number of pages	9
Journal	Review of Scientific Instruments
Volume	59
Issue number	8
DOIs	https://doi.org/10.1063/1.1139712
State	Published - 1988

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1063/1.1139712

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abstract = "The design and performance of a low-energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 μA beam of Ar+ ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space-charge diverging beam along the 44-cm path to the target. The ion optics have been optimized by the use of a new simulation program, chden, which can model a series of lenses and the effects of space-charge forces.",

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year = "1988",

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publisher = "American Institute of Physics",

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AU - Malafsky, Geoffrey P.

AU - Winograd, Nicholas

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AB - The design and performance of a low-energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 μA beam of Ar+ ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space-charge diverging beam along the 44-cm path to the target. The ion optics have been optimized by the use of a new simulation program, chden, which can model a series of lenses and the effects of space-charge forces.

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UR - https://www.scopus.com/pages/publications/36549091637#tab=citedBy

U2 - 10.1063/1.1139712

DO - 10.1063/1.1139712

M3 - Article

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EP - 1302

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 8

ER -

Transport optics for a space-charge broadening ion beam

Abstract

All Science Journal Classification (ASJC) codes

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