Tri-layer PEALD ZnO thin film transistors and circuits

Yuanyuan V. Li; Kaige G. Sun; J. Israel Ramirez; Thomas Nelson Jackson

doi:10.1109/DRC.2013.6633846

Tri-layer PEALD ZnO thin film transistors and circuits

Yuanyuan V. Li, Kaige G. Sun, J. Israel Ramirez, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	71st Device Research Conference, DRC 2013 - Conference Digest
Pages	167-168
Number of pages	2
DOIs	https://doi.org/10.1109/DRC.2013.6633846
State	Published - 2013
Event	71st Device Research Conference, DRC 2013 - Notre Dame, IN, United States Duration: Jun 23 2013 → Jun 26 2013

Publication series

Name	Device Research Conference - Conference Digest, DRC
ISSN (Print)	1548-3770

Other

Other	71st Device Research Conference, DRC 2013
Country/Territory	United States
City	Notre Dame, IN
Period	6/23/13 → 6/26/13

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/DRC.2013.6633846

Cite this

@inproceedings{c04044e88a474d22956b827cf609242b,

title = "Tri-layer PEALD ZnO thin film transistors and circuits",

author = "Li, {Yuanyuan V.} and Sun, {Kaige G.} and Ramirez, {J. Israel} and Jackson, {Thomas Nelson}",

year = "2013",

doi = "10.1109/DRC.2013.6633846",

language = "English (US)",

isbn = "9781479908110",

series = "Device Research Conference - Conference Digest, DRC",

pages = "167--168",

booktitle = "71st Device Research Conference, DRC 2013 - Conference Digest",

note = "71st Device Research Conference, DRC 2013 ; Conference date: 23-06-2013 Through 26-06-2013",

}

Li, YV, Sun, KG, Ramirez, JI & Jackson, TN 2013, Tri-layer PEALD ZnO thin film transistors and circuits. in 71st Device Research Conference, DRC 2013 - Conference Digest., 6633846, Device Research Conference - Conference Digest, DRC, pp. 167-168, 71st Device Research Conference, DRC 2013, Notre Dame, IN, United States, 6/23/13. https://doi.org/10.1109/DRC.2013.6633846

TY - GEN

T1 - Tri-layer PEALD ZnO thin film transistors and circuits

AU - Li, Yuanyuan V.

AU - Sun, Kaige G.

AU - Ramirez, J. Israel

AU - Jackson, Thomas Nelson

PY - 2013

Y1 - 2013

UR - http://www.scopus.com/inward/record.url?scp=84890062235&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84890062235&partnerID=8YFLogxK

U2 - 10.1109/DRC.2013.6633846

DO - 10.1109/DRC.2013.6633846

M3 - Conference contribution

AN - SCOPUS:84890062235

SN - 9781479908110

T3 - Device Research Conference - Conference Digest, DRC

SP - 167

EP - 168

BT - 71st Device Research Conference, DRC 2013 - Conference Digest

T2 - 71st Device Research Conference, DRC 2013

Y2 - 23 June 2013 through 26 June 2013

ER -

Tri-layer PEALD ZnO thin film transistors and circuits

Publication series

Other

All Science Journal Classification (ASJC) codes

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