TSV fault detection with large non-contact probes using capacitive coupling for 3-D IC applications

Youngkyu Kim, Seok Jae Lee, Jin Ho Ahn, Won Sang Yoon, Madhavan Swaminathan, Sang Min Han

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A non-contact TSV fault detection method is proposed using capacitive coupled probing. The proposed method detects TSV faults by eye-pattern diagrams of extracted EM-modeled transfer characteristics. The TSV and a capacitive coupling is modeled using full wave analysis. Because the measurement is conducted by moving one top probe without contact alignment, it can achieve the fast detection. Moreover, several TSVs can be covered at one measurement. From the experimental results, the fault existence and no. of faults can be detected with good resolutions.

Original languageEnglish (US)
Title of host publication2015 IEEE Electrical Design of Advanced Packaging and Systems Symposium, IEEE EDAPS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages58-61
Number of pages4
ISBN (Electronic)9781467380997
DOIs
StatePublished - Jan 14 2016
EventIEEE Electrical Design of Advanced Packaging and Systems Symposium, IEEE EDAPS 2015 - Seoul, Korea, Republic of
Duration: Dec 14 2015Dec 16 2015

Publication series

Name2015 IEEE Electrical Design of Advanced Packaging and Systems Symposium, IEEE EDAPS 2015

Conference

ConferenceIEEE Electrical Design of Advanced Packaging and Systems Symposium, IEEE EDAPS 2015
Country/TerritoryKorea, Republic of
CitySeoul
Period12/14/1512/16/15

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Fingerprint

Dive into the research topics of 'TSV fault detection with large non-contact probes using capacitive coupling for 3-D IC applications'. Together they form a unique fingerprint.

Cite this