Tunable high-quality-factor interdigitated (Ba, Sr)TiO₃ capacitors fabricated on low-cost substrates with copper metallization

Keyphrases

• Low-cost Substrates 100%
• Capacitors 100%
• Interdigitated Capacitor 100%
• BaSrTiO3 100%
• High Quality Factor 100%
• Metallization 50%
• Volume Production 50%
• Alumina Substrate 50%
• Dielectric 50%
• DC Bias 50%
• Single-crystalline 50%
• Applied Electric Field 50%
• Dielectric Layer 50%
• Zero Bias 50%
• Microwave Measurements 50%
• Large Volume 50%
• Gap Size 50%
• Loss Tangent 50%
• Barium Strontium Titanate 50%
• Electrode Gap 50%
• Crystalline Substrate 50%
• Magnetron Sputtering 50%
• Polycrystalline Alumina 50%
• Dielectric Tunability 50%

Chemical Engineering

• Metallizing 100%
• Barium Strontium Titanate 25%
• Microwave Measurement 25%
• Magnetron Sputtering 25%