Tunable TE-Mode Resonators based on Ferroelectric AlScN Thin Films for RF Applications

Mingyo Park, Azadeh Ansari

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This work presents the characterization of ferroelectric Aluminum Scandium Nitride (AlScN) thin films for multi-frequency high-order overtone mode resonators used in radio frequency (RF) filtering applications. Three types of AlScN-based thickness-extensional (TE) mode resonators are cofabricated on the same silicon-on-insulator (SOI) platform, 1) High-overtone Bulk Acoustic Resonator (HBAR), 2) Composite Film Bulk Acoustic Resonator (C-FBAR), and 3) Thin Film Bulk Acoustic Resonator (FBAR). We report on the experimental results and analysis of acoustic characteristics and ferroelectric behavior in the Al0.7Sc0.3N-based thickness extensional (TE) mode resonators with these different substrate configurations. We observed the effect of thin-film stress on coercive field and evaluated the loss mechanism depending on a substrate layer underneath the sandwiched piezoelectric structure.

Original languageEnglish (US)
Title of host publication2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665497183
DOIs
StatePublished - 2022
Event2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Paris, France
Duration: Apr 24 2022Apr 28 2022

Publication series

Name2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings

Conference

Conference2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022
Country/TerritoryFrance
CityParis
Period4/24/224/28/22

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Signal Processing
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

Fingerprint

Dive into the research topics of 'Tunable TE-Mode Resonators based on Ferroelectric AlScN Thin Films for RF Applications'. Together they form a unique fingerprint.

Cite this