TY - GEN
T1 - Tunable TE-Mode Resonators based on Ferroelectric AlScN Thin Films for RF Applications
AU - Park, Mingyo
AU - Ansari, Azadeh
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This work presents the characterization of ferroelectric Aluminum Scandium Nitride (AlScN) thin films for multi-frequency high-order overtone mode resonators used in radio frequency (RF) filtering applications. Three types of AlScN-based thickness-extensional (TE) mode resonators are cofabricated on the same silicon-on-insulator (SOI) platform, 1) High-overtone Bulk Acoustic Resonator (HBAR), 2) Composite Film Bulk Acoustic Resonator (C-FBAR), and 3) Thin Film Bulk Acoustic Resonator (FBAR). We report on the experimental results and analysis of acoustic characteristics and ferroelectric behavior in the Al0.7Sc0.3N-based thickness extensional (TE) mode resonators with these different substrate configurations. We observed the effect of thin-film stress on coercive field and evaluated the loss mechanism depending on a substrate layer underneath the sandwiched piezoelectric structure.
AB - This work presents the characterization of ferroelectric Aluminum Scandium Nitride (AlScN) thin films for multi-frequency high-order overtone mode resonators used in radio frequency (RF) filtering applications. Three types of AlScN-based thickness-extensional (TE) mode resonators are cofabricated on the same silicon-on-insulator (SOI) platform, 1) High-overtone Bulk Acoustic Resonator (HBAR), 2) Composite Film Bulk Acoustic Resonator (C-FBAR), and 3) Thin Film Bulk Acoustic Resonator (FBAR). We report on the experimental results and analysis of acoustic characteristics and ferroelectric behavior in the Al0.7Sc0.3N-based thickness extensional (TE) mode resonators with these different substrate configurations. We observed the effect of thin-film stress on coercive field and evaluated the loss mechanism depending on a substrate layer underneath the sandwiched piezoelectric structure.
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U2 - 10.1109/EFTF/IFCS54560.2022.9850755
DO - 10.1109/EFTF/IFCS54560.2022.9850755
M3 - Conference contribution
AN - SCOPUS:85137366875
T3 - 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
BT - 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022
Y2 - 24 April 2022 through 28 April 2022
ER -