@inproceedings{ff95e59c95654a0eb50f94172032b4e0,
title = "Two-dimensional MEMS array for maskless lithography and wavefront modulation",
abstract = "We review the fabrication process of a recently introduced phase only MEMS based spatial light modulators for maskless lithography. A brief description of this device is presented. The physical properties of its structural layers and the difficulties encountered during its fabrication process are described in detail.",
author = "D. L{\'o}pez and Aksyuk, {V. A.} and Watson, {G. P.} and Mansfield, {W. M.} and R. Cirelli and F. Klemens and F. Pardo and E. Ferry and J. Miner and Sorsch, {T. W.} and M. Peabody and J. Bower and M. Peabody and Pai, {C. S.} and J. Gates",
year = "2007",
doi = "10.1117/12.724467",
language = "English (US)",
isbn = "0819467170",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Smart Sensors, Actuators, and MEMS III",
note = "Smart Sensors, Actuators, and MEMS III ; Conference date: 02-05-2007 Through 04-05-2007",
}