Two-dimensional MEMS array for maskless lithography and wavefront modulation

D. López, V. A. Aksyuk, G. P. Watson, W. M. Mansfield, R. Cirelli, F. Klemens, F. Pardo, E. Ferry, J. Miner, T. W. Sorsch, M. Peabody, J. Bower, M. Peabody, C. S. Pai, J. Gates

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations


We review the fabrication process of a recently introduced phase only MEMS based spatial light modulators for maskless lithography. A brief description of this device is presented. The physical properties of its structural layers and the difficulties encountered during its fabrication process are described in detail.

Original languageEnglish (US)
Title of host publicationSmart Sensors, Actuators, and MEMS III
StatePublished - 2007
EventSmart Sensors, Actuators, and MEMS III - Maspalomas, Gran Canaria, Spain
Duration: May 2 2007May 4 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceSmart Sensors, Actuators, and MEMS III
CityMaspalomas, Gran Canaria

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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