@inproceedings{017f7abce103460eb867aa3b2d661f86,
title = "Two dimensional MEMS piston array for DUV optical pattern generation",
abstract = "We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfill the requirements needed to modulate Deep Ultraviolet radiation for maskless pattern generation.",
author = "D. L{\'o}pez and V. Aksyuk and G. Watson and Simon, {M. E.} and W. Mansfield and F. Klemens and R. Cirelli and E. Ferry and A. Papazian and F. Pardo and C. Bolle and N. Basavanhally and J. Bower and J. Miner and T. Sorsch and D. Tennant",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
year = "2006",
doi = "10.1109/omems.2006.1708308",
language = "English (US)",
isbn = "078039562X",
series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
publisher = "IEEE Computer Society",
pages = "148--149",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
address = "United States",
}