Two dimensional MEMS piston array for DUV optical pattern generation

D. López; V. Aksyuk; G. Watson; M. E. Simon; W. Mansfield; F. Klemens; R. Cirelli; E. Ferry; A. Papazian; F. Pardo; C. Bolle; N. Basavanhally; J. Bower; J. Miner; T. Sorsch; D. Tennant

doi:10.1109/omems.2006.1708308

Two dimensional MEMS piston array for DUV optical pattern generation

D. López
, V. Aksyuk
, G. Watson
, M. E. Simon
, W. Mansfield
, F. Klemens
, R. Cirelli
, E. Ferry
, A. Papazian
, F. Pardo
, C. Bolle
, N. Basavanhally
, J. Bower
, J. Miner
, T. Sorsch
, D. Tennant

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

9 Scopus citations

Abstract

We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfill the requirements needed to modulate Deep Ultraviolet radiation for maskless pattern generation.

Original language	English (US)
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Publisher	IEEE Computer Society
Pages	148-149
Number of pages	2
ISBN (Print)	078039562X, 9780780395626
DOIs	https://doi.org/10.1109/omems.2006.1708308
State	Published - 2006
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: Aug 21 2006 → Aug 24 2006

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

Conference	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/Territory	United States
City	Big Sky, MT
Period	8/21/06 → 8/24/06

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1109/omems.2006.1708308

Cite this

López, D., Aksyuk, V., Watson, G., Simon, M. E., Mansfield, W., Klemens, F., Cirelli, R., Ferry, E., Papazian, A., Pardo, F., Bolle, C., Basavanhally, N., Bower, J., Miner, J., Sorsch, T., & Tennant, D. (2006). Two dimensional MEMS piston array for DUV optical pattern generation. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 148-149). Article 1708308 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). IEEE Computer Society. https://doi.org/10.1109/omems.2006.1708308

@inproceedings{017f7abce103460eb867aa3b2d661f86,

title = "Two dimensional MEMS piston array for DUV optical pattern generation",

abstract = "We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfill the requirements needed to modulate Deep Ultraviolet radiation for maskless pattern generation.",

author = "D. L{\'o}pez and V. Aksyuk and G. Watson and Simon, \{M. E.\} and W. Mansfield and F. Klemens and R. Cirelli and E. Ferry and A. Papazian and F. Pardo and C. Bolle and N. Basavanhally and J. Bower and J. Miner and T. Sorsch and D. Tennant",

note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",

year = "2006",

doi = "10.1109/omems.2006.1708308",

language = "English (US)",

isbn = "078039562X",

series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

publisher = "IEEE Computer Society",

pages = "148--149",

booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

address = "United States",

}

López, D, Aksyuk, V, Watson, G, Simon, ME, Mansfield, W, Klemens, F, Cirelli, R, Ferry, E, Papazian, A, Pardo, F, Bolle, C, Basavanhally, N, Bower, J, Miner, J, Sorsch, T & Tennant, D 2006, Two dimensional MEMS piston array for DUV optical pattern generation. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708308, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, IEEE Computer Society, pp. 148-149, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 8/21/06. https://doi.org/10.1109/omems.2006.1708308

Two dimensional MEMS piston array for DUV optical pattern generation. / López, D.; Aksyuk, V.; Watson, G. et al.
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society, 2006. p. 148-149 1708308 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Two dimensional MEMS piston array for DUV optical pattern generation

AU - López, D.

AU - Aksyuk, V.

AU - Watson, G.

AU - Simon, M. E.

AU - Mansfield, W.

AU - Klemens, F.

AU - Cirelli, R.

AU - Ferry, E.

AU - Papazian, A.

AU - Pardo, F.

AU - Bolle, C.

AU - Basavanhally, N.

AU - Bower, J.

AU - Miner, J.

AU - Sorsch, T.

AU - Tennant, D.

PY - 2006

Y1 - 2006

N2 - We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfill the requirements needed to modulate Deep Ultraviolet radiation for maskless pattern generation.

AB - We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfill the requirements needed to modulate Deep Ultraviolet radiation for maskless pattern generation.

UR - https://www.scopus.com/pages/publications/41549103433

UR - https://www.scopus.com/pages/publications/41549103433#tab=citedBy

U2 - 10.1109/omems.2006.1708308

DO - 10.1109/omems.2006.1708308

M3 - Conference contribution

AN - SCOPUS:41549103433

SN - 078039562X

SN - 9780780395626

T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

SP - 148

EP - 149

BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

PB - IEEE Computer Society

T2 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Y2 - 21 August 2006 through 24 August 2006

ER -

López D, Aksyuk V, Watson G, Simon ME, Mansfield W, Klemens F et al. Two dimensional MEMS piston array for DUV optical pattern generation. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society. 2006. p. 148-149. 1708308. (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). doi: 10.1109/omems.2006.1708308

Two dimensional MEMS piston array for DUV optical pattern generation

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this