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Two dimensional MEMS piston array for DUV optical pattern generation
D. López, V. Aksyuk, G. Watson, M. E. Simon, W. Mansfield, F. Klemens, R. Cirelli, E. Ferry, A. Papazian, F. Pardo, C. Bolle, N. Basavanhally, J. Bower, J. Miner, T. Sorsch, D. Tennant
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
8
Scopus
citations