Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies

Philip X.L. Feng; Zenghui Wang; Jaesung Lee; Rui Yang; Xuqian Zheng; Keliang He; Jie Shan

doi:10.1109/IEDM.2014.7047008

Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies

Philip X.L. Feng, Zenghui Wang, Jaesung Lee, Rui Yang, Xuqian Zheng, Keliang He, Jie Shan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

We report on the initial explorations of engineering atomically-thin semiconducting crystals into a new class of two-dimensional nanoelectromechanical systems (2D NEMS) that are attractive for realizing ultimately thin 2D transducers for embedding in both planar and curved systems. We describe the first resonant NEMS operating at radio frequencies (RF), based on MoS₂, a hallmark of 2D semiconducting crystals derived from layered materials in transition metal dichalcogenides (TMDCs). Through a series of careful measurements and analyses, we demonstrate a family of MoS₂ 2D NEMS resonators possessing very high fundamental-mode frequencies (f₀∼120MHz, in the VHF band), very broad dynamic range (DR∼70-110dB), rich nonlinear dynamics, and outstanding electrical tunability.

Original language	English (US)
Title of host publication	2014 IEEE International Electron Devices Meeting, IEDM 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	8.1.1-8.1.4
Edition	February
ISBN (Electronic)	9781479980017
DOIs	https://doi.org/10.1109/IEDM.2014.7047008
State	Published - Feb 20 2015
Event	2014 60th IEEE International Electron Devices Meeting, IEDM 2014 - San Francisco, United States Duration: Dec 15 2014 → Dec 17 2014

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
Number	February
Volume	2015-February
ISSN (Print)	0163-1918

Other

Other	2014 60th IEEE International Electron Devices Meeting, IEDM 2014
Country/Territory	United States
City	San Francisco
Period	12/15/14 → 12/17/14

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1109/IEDM.2014.7047008

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Feng, P. X. L., Wang, Z., Lee, J., Yang, R., Zheng, X., He, K., & Shan, J. (2015). Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies. In 2014 IEEE International Electron Devices Meeting, IEDM 2014 (February ed., pp. 8.1.1-8.1.4). Article 7047008 (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.2014.7047008

Feng, Philip X.L. ; Wang, Zenghui ; Lee, Jaesung et al. / Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies. 2014 IEEE International Electron Devices Meeting, IEDM 2014. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 8.1.1-8.1.4 (Technical Digest - International Electron Devices Meeting, IEDM; February).

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title = "Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies",

abstract = "We report on the initial explorations of engineering atomically-thin semiconducting crystals into a new class of two-dimensional nanoelectromechanical systems (2D NEMS) that are attractive for realizing ultimately thin 2D transducers for embedding in both planar and curved systems. We describe the first resonant NEMS operating at radio frequencies (RF), based on MoS2, a hallmark of 2D semiconducting crystals derived from layered materials in transition metal dichalcogenides (TMDCs). Through a series of careful measurements and analyses, we demonstrate a family of MoS2 2D NEMS resonators possessing very high fundamental-mode frequencies (f0∼120MHz, in the VHF band), very broad dynamic range (DR∼70-110dB), rich nonlinear dynamics, and outstanding electrical tunability.",

author = "Feng, {Philip X.L.} and Zenghui Wang and Jaesung Lee and Rui Yang and Xuqian Zheng and Keliang He and Jie Shan",

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Feng, PXL, Wang, Z, Lee, J, Yang, R, Zheng, X, He, K & Shan, J 2015, Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies. in 2014 IEEE International Electron Devices Meeting, IEDM 2014. February edn, 7047008, Technical Digest - International Electron Devices Meeting, IEDM, no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 8.1.1-8.1.4, 2014 60th IEEE International Electron Devices Meeting, IEDM 2014, San Francisco, United States, 12/15/14. https://doi.org/10.1109/IEDM.2014.7047008

Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies. / Feng, Philip X.L.; Wang, Zenghui; Lee, Jaesung et al.
2014 IEEE International Electron Devices Meeting, IEDM 2014. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 8.1.1-8.1.4 7047008 (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Zheng, Xuqian

AU - He, Keliang

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AB - We report on the initial explorations of engineering atomically-thin semiconducting crystals into a new class of two-dimensional nanoelectromechanical systems (2D NEMS) that are attractive for realizing ultimately thin 2D transducers for embedding in both planar and curved systems. We describe the first resonant NEMS operating at radio frequencies (RF), based on MoS2, a hallmark of 2D semiconducting crystals derived from layered materials in transition metal dichalcogenides (TMDCs). Through a series of careful measurements and analyses, we demonstrate a family of MoS2 2D NEMS resonators possessing very high fundamental-mode frequencies (f0∼120MHz, in the VHF band), very broad dynamic range (DR∼70-110dB), rich nonlinear dynamics, and outstanding electrical tunability.

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Feng PXL, Wang Z, Lee J, Yang R, Zheng X, He K et al. Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies. In 2014 IEEE International Electron Devices Meeting, IEDM 2014. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 8.1.1-8.1.4. 7047008. (Technical Digest - International Electron Devices Meeting, IEDM; February). doi: 10.1109/IEDM.2014.7047008

Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies

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