Ultralow Index SiO₂Antireflection Coatings Produced via Magnetron Sputtering

Antireflection (AR) coatings with graded refractive index profiles approaching air offer unparalleled AR performance but lack a scalable fabrication process that would enable them to be used more widely in applications such as architecture and solar energy conversion. This work introduces a sputtering-based sacrificial porogen process to fabricate multilayer nanoporous SiO₂coatings with tunable refractive index down to n_eff= 1.11. Using this approach, we demonstrate a step-graded bilayer AR coating with outstanding wide-angle AR performance (single side average reflectivity in the visible spectrum ranges from 0.2% at normal incidence to 0.7% at 40°), good adhesion, and promising environmental durability. These results open up a path to produce ultrahigh performance AR coatings over large area by using industrial-scale magnetron sputtering systems.