@inproceedings{c5996dfda6754a05a11cfc024068486d,
title = "Ultraprecision micromachining of microfluidic devices by use of a high-speed airbearing spindle",
author = "Chunhe Zhang and Yi, {Allen Y.} and Lei Li and Lee, {L. James} and Vallance, {R. Ryan} and Eric Marsh",
year = "2007",
language = "English (US)",
isbn = "9781887706438",
series = "Proceedings - ASPE Summer Topical Meeting on Precision Bearings and Spindles, ASPE 2007",
pages = "80--84",
booktitle = "Proceedings - ASPE Summer Topical Meeting on Precision Bearings and Spindles, ASPE 2007",
note = "ASPE Summer Topical Meeting on Precision Bearings and Spindles, ASPE 2007 ; Conference date: 11-06-2007 Through 12-06-2007",
}