Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization

Nishit Goel, Stephen Bart, Srinivas Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations


A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts of these resonators due to the sensor's diaphragm bending. The sensors show a large dynamic range of 1 mTorr-760 Torr with a resolution ∼1.06 mTorr for 82.4 MHz resonators with a high linearity. Here we report on the parametric study to improve sensitivity of these sensors.

Original languageEnglish (US)
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages3
ISBN (Electronic)9781509010127
StatePublished - Dec 21 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: Oct 30 2017Nov 1 2017

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Other16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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