TY - GEN
T1 - Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization
AU - Goel, Nishit
AU - Bart, Stephen
AU - Tadigadapa, Srinivas
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/12/21
Y1 - 2017/12/21
N2 - A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts of these resonators due to the sensor's diaphragm bending. The sensors show a large dynamic range of 1 mTorr-760 Torr with a resolution ∼1.06 mTorr for 82.4 MHz resonators with a high linearity. Here we report on the parametric study to improve sensitivity of these sensors.
AB - A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts of these resonators due to the sensor's diaphragm bending. The sensors show a large dynamic range of 1 mTorr-760 Torr with a resolution ∼1.06 mTorr for 82.4 MHz resonators with a high linearity. Here we report on the parametric study to improve sensitivity of these sensors.
UR - http://www.scopus.com/inward/record.url?scp=85044274545&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85044274545&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2017.8234417
DO - 10.1109/ICSENS.2017.8234417
M3 - Conference contribution
AN - SCOPUS:85044274545
T3 - Proceedings of IEEE Sensors
SP - 1
EP - 3
BT - IEEE SENSORS 2017 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th IEEE SENSORS Conference, ICSENS 2017
Y2 - 30 October 2017 through 1 November 2017
ER -