Ultraviolet-curable polymers with chemically bonded carbon nanotubes for microelectromechanical system applications

Jining Xie, Nanyan Zhang, Manton Guers, Vijay K. Varadan

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


Current UV-curable polymer techniques for microelectromechanical system fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in situ polymerization. Purified multi-walled nanotubes, obtained by the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy was used to identify the -OH and -COOH groups attached to the nanotube surface. The UV-curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between the -NCO groups of TDI and the -OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared spectra. This new UV-curable polymer is expected to be a cost-effective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.

Original languageEnglish (US)
Pages (from-to)575-580
Number of pages6
JournalSmart Materials and Structures
Issue number4
StatePublished - Aug 1 2002

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Civil and Structural Engineering
  • Atomic and Molecular Physics, and Optics
  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering


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