Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films

Engineering & Materials Science

• Ultraviolet radiation 100%
• Thermodynamic stability 79%
• Thin films 72%
• Degradation 53%
• Thermal desorption 40%
• Spectrometry 33%
• Refractive index 33%
• Optical properties 31%
• Fourier transform infrared spectroscopy 31%
• Dosimetry 31%
• Leakage currents 27%
• Electric properties 27%
• Permittivity 25%
• Annealing 25%
• Current density 24%
• Oxidation 22%

Physics & Astronomy

• ultraviolet radiation 76%
• thermal stability 67%
• degradation 57%
• thin films 39%
• electrical measurement 24%
• infrared spectroscopy 23%
• desorption 22%
• leakage 21%
• dissipation 20%
• oxidation 18%
• electrical properties 18%
• current density 18%
• refractivity 17%
• permittivity 17%
• dosage 16%
• optical properties 16%
• annealing 15%
• radiation 14%
• spectroscopy 13%

Chemical Compounds

• Thermal Stability 50%
• Liquid Film 37%
• Leakage Current 33%
• Dissipation 27%
• Refractive Index 24%
• Dielectric Constant 23%
• Electrical Property 21%
• Annealing 20%
• Dose 19%
• Desorption 19%
• Current Density 18%
• Optical Property 18%
• Fourier Transform Infrared Spectroscopy 14%
• Oxidation Reaction 11%