Abstract
The E-beam pattern generators, developed for making masks for integrated circuits with submicron features, are extremely attractive for producing high quality computer generated holograms (CGH). The procedure for making the E-beam written CGH along with its properties will be described. Application of these CGH's to spatial frequency multiplexed optical processors for pattern recognition will be discussed.
Original language | English (US) |
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Pages (from-to) | 48-53 |
Number of pages | 6 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 437 |
DOIs | |
State | Published - Oct 26 1983 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering