Abstract
Current ultraviolet (UV) curable polymer techniques for MEMS fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy (XPS) was used to identify the -OH and -COOH groups attached to nanotube surface. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared (FTIR) spectra. This new UV-curable polymer is expected to be a cost-effective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 515-525 |
| Number of pages | 11 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4935 |
| DOIs | |
| State | Published - 2002 |
| Event | Smart Structures, Devices, and Systems - Melbourne, VIC., Australia Duration: Dec 16 2002 → Dec 18 2002 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering