UV-curable polymers with functionalized carbon nanotubes for MEMS

Jining Xie, Nanyan Zhang, Manton Guers, Vijay K. Varadan

Research output: Contribution to journalConference articlepeer-review


Current ultraviolet (UV) curable polymer techniques for EMS fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy (XPS) was used to identify the -OH and -COOH groups attached to nanotube surface. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared (FTIR) spectra. This new UV-curable polymer is expected to be a cost-effective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.

Original languageEnglish (US)
Pages (from-to)177-188
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
EventSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 3 2003Mar 5 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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