Vapor-Deposition Techniques

Raúl J. Martín-Palma, Akhlesh Lakhtakia

Research output: Chapter in Book/Report/Conference proceedingChapter

40 Scopus citations

Abstract

The term vapor deposition encompasses a large palette of techniques essential for both the reproduction of certain structural features of a biotemplate and the replication of a biotemplate. Physical vapor deposition, chemical vapor deposition, atomic layer deposition, and molecular beam epitaxy are succinctly described in this chapter in the context of engineered biomimicry.

Original languageEnglish (US)
Title of host publicationEngineered Biomimicry
PublisherElsevier Inc.
Pages383-398
Number of pages16
ISBN (Print)9780124159952
DOIs
StatePublished - Jun 2013

All Science Journal Classification (ASJC) codes

  • General Biochemistry, Genetics and Molecular Biology

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