Abstract
A vertical short gate GaAs FET structure is constructed. The main manufacturing steps are briefly outlined.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 6418-6420 |
| Number of pages | 3 |
| Journal | IBM technical disclosure bulletin |
| Volume | 25 |
| Issue number | 12 |
| State | Published - Jan 1 1983 |
All Science Journal Classification (ASJC) codes
- General Engineering
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