Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

Byron Knapp; Dan Oss; Dave Arneson; Mel Liebers; Eric Marsh

Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

Byron Knapp, Dan Oss, Dave Arneson, Mel Liebers, Eric Marsh

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Proceedings - ASPE 2012 Summer Topical Meeting
Subtitle of host publication	Precision Engineering and Mechatronics Supporting the Semiconductor Industry
Pages	45-48
Number of pages	4
State	Published - 2012
Event	ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry - Berkeley, CA, United States Duration: Jun 24 2012 → Jun 26 2012

Publication series

Name	Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry
Volume	53

Other

Other	ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry
Country/Territory	United States
City	Berkeley, CA
Period	6/24/12 → 6/26/12

All Science Journal Classification (ASJC) codes

Engineering (miscellaneous)

Cite this

Knapp, B., Oss, D., Arneson, D., Liebers, M., & Marsh, E. (2012). Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. In Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry (pp. 45-48). (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry; Vol. 53).

Knapp, Byron ; Oss, Dan ; Arneson, Dave et al. / Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. 2012. pp. 45-48 (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry).

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title = "Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles",

author = "Byron Knapp and Dan Oss and Dave Arneson and Mel Liebers and Eric Marsh",

year = "2012",

language = "English (US)",

isbn = "9781887706605",

series = "Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry",

pages = "45--48",

booktitle = "Proceedings - ASPE 2012 Summer Topical Meeting",

note = "ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry ; Conference date: 24-06-2012 Through 26-06-2012",

}

Knapp, B, Oss, D, Arneson, D, Liebers, M & Marsh, E 2012, Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. in Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry, vol. 53, pp. 45-48, ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry, Berkeley, CA, United States, 6/24/12.

Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. / Knapp, Byron; Oss, Dan; Arneson, Dave et al.
Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. 2012. p. 45-48 (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry; Vol. 53).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

AU - Knapp, Byron

AU - Oss, Dan

AU - Arneson, Dave

AU - Liebers, Mel

AU - Marsh, Eric

PY - 2012

Y1 - 2012

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M3 - Conference contribution

AN - SCOPUS:84884319030

SN - 9781887706605

T3 - Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry

SP - 45

EP - 48

BT - Proceedings - ASPE 2012 Summer Topical Meeting

T2 - ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry

Y2 - 24 June 2012 through 26 June 2012

ER -

Knapp B, Oss D, Arneson D, Liebers M, Marsh E. Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. In Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. 2012. p. 45-48. (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry).

Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

Publication series

Other

All Science Journal Classification (ASJC) codes

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Cite this