Abstract
This paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system.
Original language | English (US) |
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Pages (from-to) | 543-550 |
Number of pages | 8 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 16 |
Issue number | 3 |
DOIs | |
State | Published - Aug 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering