Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang; Shengyuan Chang; Xi Chen; Yimin Ding; Md Tarek Rahman; Yao; Duan; Pavel Terekhov; Xingjie Ni

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Yao, Duan, Pavel Terekhov, Xingjie Ni

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 um fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

Original language	English (US)
Title of host publication	2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781957171050
State	Published - 2022
Event	2022 Conference on Lasers and Electro-Optics, CLEO 2022 - San Jose, United States Duration: May 15 2022 → May 20 2022

Publication series

Name	2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

Conference

Conference	2022 Conference on Lasers and Electro-Optics, CLEO 2022
Country/Territory	United States
City	San Jose
Period	5/15/22 → 5/20/22

All Science Journal Classification (ASJC) codes

Instrumentation
Spectroscopy
Biomedical Engineering
Electrical and Electronic Engineering
Management, Monitoring, Policy and Law
Materials Science (miscellaneous)
Acoustics and Ultrasonics
Atomic and Molecular Physics, and Optics

Cite this

Zhang, L., Chang, S., Chen, X., Ding, Y., Rahman, M. T., Yao, Duan, Terekhov, P., & Ni, X. (2022). Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography. In 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings Article FF2D.4 (2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings). Institute of Electrical and Electronics Engineers Inc..

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title = "Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography",

abstract = "We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 um fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.",

author = "Lidan Zhang and Shengyuan Chang and Xi Chen and Yimin Ding and Rahman, {Md Tarek} and Yao and Duan and Pavel Terekhov and Xingjie Ni",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); 2022 Conference on Lasers and Electro-Optics, CLEO 2022 ; Conference date: 15-05-2022 Through 20-05-2022",

year = "2022",

language = "English (US)",

series = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",

address = "United States",

}

Zhang, L, Chang, S, Chen, X, Ding, Y, Rahman, MT, Yao, Duan, Terekhov, P & Ni, X 2022, Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography. in 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings., FF2D.4, 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2022 Conference on Lasers and Electro-Optics, CLEO 2022, San Jose, United States, 5/15/22.

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography. / Zhang, Lidan; Chang, Shengyuan; Chen, Xi et al.
2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. FF2D.4 (2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

AU - Zhang, Lidan

AU - Chang, Shengyuan

AU - Chen, Xi

AU - Ding, Yimin

AU - Rahman, Md Tarek

AU - Yao,

AU - Duan,

AU - Terekhov, Pavel

AU - Ni, Xingjie

PY - 2022

Y1 - 2022

N2 - We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 um fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

AB - We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 um fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

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M3 - Conference contribution

AN - SCOPUS:85139949856

T3 - 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

BT - 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2022 Conference on Lasers and Electro-Optics, CLEO 2022

Y2 - 15 May 2022 through 20 May 2022

ER -

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

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