@inproceedings{251be7b13e7040cfab1b6f17fcb82ccd,
title = "Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography",
abstract = "We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 um fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80\% focusing efficiency.",
author = "Lidan Zhang and Shengyuan Chang and Xi Chen and Yimin Ding and Rahman, \{Md Tarek\} and Yao and Duan and Pavel Terekhov and Xingjie Ni",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); 2022 Conference on Lasers and Electro-Optics, CLEO 2022 ; Conference date: 15-05-2022 Through 20-05-2022",
year = "2022",
language = "English (US)",
series = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",
address = "United States",
}