Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Yao, Duan, Pavel Terekhov, Xingjie Ni

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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