Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Duan Yao, Pavel Terekhov, Xingjie Ni

Research output: Contribution to journalConference articlepeer-review

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Engineering

Physics

Earth and Planetary Sciences