TY - GEN
T1 - Whispering gallery mode based on-chip glass microbubble resonator for thermal sensing
AU - Zhang, Chenchen
AU - Cocking, Alex
AU - Freeman, Eugene
AU - Liu, Zhiwen
AU - Tadigadapa, Srinivas
PY - 2017/7/26
Y1 - 2017/7/26
N2 - This paper reports the first experimental observations of whispering gallery mode (WGM) resonance in on-chip glass microbubble structures. Using microfabrication methods, chip-scale glass microbubbles with ultra-smooth surface and sub-micrometer wall thickness are shown to support optical resonance modes with ultra-high Q-factors of >107. The resonance is highly sensitive to temperature, with measured sensitivity of -1.8 GHz/°C. Based upon the signal to noise performance, this corresponds to a temperature resolution of 55 μΚ.
AB - This paper reports the first experimental observations of whispering gallery mode (WGM) resonance in on-chip glass microbubble structures. Using microfabrication methods, chip-scale glass microbubbles with ultra-smooth surface and sub-micrometer wall thickness are shown to support optical resonance modes with ultra-high Q-factors of >107. The resonance is highly sensitive to temperature, with measured sensitivity of -1.8 GHz/°C. Based upon the signal to noise performance, this corresponds to a temperature resolution of 55 μΚ.
UR - http://www.scopus.com/inward/record.url?scp=85029374158&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029374158&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994128
DO - 10.1109/TRANSDUCERS.2017.7994128
M3 - Conference contribution
AN - SCOPUS:85029374158
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 630
EP - 633
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -