TY - JOUR
T1 - Wideband MEMS resonator using multifrequency excitation
AU - Jaber, N.
AU - Ramini, A.
AU - Hennawi, Q.
AU - Younis, M. I.
N1 - Funding Information:
Mohammad I. Younis received the B.S. degree in mechanical engineering from the Jordan University of Science and Technology, Irbid, Jordan, in 1999, and the M.S. and Ph.D. degrees in engineering mechanics from Virginia Polytechnic Institute and State University, Blacksburg, VA, USA, in 2001 and 2004, respectively. He is currently an Associate Professor of Mechanical Engineering with the King Abdullah University of Science and Technology, Thuwal, Saudi Arabia, and the State University of New York (SUNY), Binghamton, NY, USA. He serves as the Director of the MEMS and NEMS Characterization and Motion Laboratory. Dr. Younis was a recipient of the SUNY Chancellor's Award for Excellence in Scholarship and Creative Activities in 2012, the National Science Foundation Faculty Early Career Development Award in 2009, and the Paul E. Torgersen Graduate Research Excellence Award in 2002. He holds three U.S. patents in MEMS sensors and actuators. He serves as an Associate Editor of Nonlinear Dynamics, the Journal of Computational and Nonlinear Dynamics, the Journal of Vibration and Control, and Mathematical Problems in Engineering. He has authored the book entitled MEMS Linear and Nonlinear Statics and Dynamics (Springer, 2011). He is a member of the American Society of Mechanical Engineers.
Publisher Copyright:
© 2016 Elsevier B.V. All rights reserved.
Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 2016/5/1
Y1 - 2016/5/1
N2 - We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.
AB - We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.
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U2 - 10.1016/j.sna.2016.02.030
DO - 10.1016/j.sna.2016.02.030
M3 - Article
AN - SCOPUS:84961155573
SN - 0924-4247
VL - 242
SP - 140
EP - 145
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
ER -