TY - GEN
T1 - Will strong quantum confinement effect limit low V CC logic application of III-V FINFETs?
AU - Nidhi, A.
AU - Saripalli, V.
AU - Narayanan, Vijaykrishnan
AU - Kimura, Y.
AU - Arghavani, R.
AU - Datta, S.
PY - 2012
Y1 - 2012
N2 - We compared the impact of Fin LER and Lg variations in Si and In 0.53Ga 0.47As FINFETs, for the first time. Better electrostatics in In 0.53Ga 0.47As than in Si, due to higher effective channel length from lower SD doping in In 0.53Ga 0.47As, reduces Lg variation impact. Strong quantum confinement effects in In 0.53Ga 0.47As FINFET make them more sensitive to Fin LER variation than Si. However, the lower sensitivity to LG variation in In 0.53Ga 0.47As FINFETs compensates for the increased variation from quantum confinement effect. Interestingly, by considering both Fin LER and LG variations, both devices show similar sensitivity to variation. We conclude that tighter control of Fin LER in In 0.53Ga 0.47As together with improved short channel immunity will make III-VFINFETs a promising device for 0.5V and below logic applications.
AB - We compared the impact of Fin LER and Lg variations in Si and In 0.53Ga 0.47As FINFETs, for the first time. Better electrostatics in In 0.53Ga 0.47As than in Si, due to higher effective channel length from lower SD doping in In 0.53Ga 0.47As, reduces Lg variation impact. Strong quantum confinement effects in In 0.53Ga 0.47As FINFET make them more sensitive to Fin LER variation than Si. However, the lower sensitivity to LG variation in In 0.53Ga 0.47As FINFETs compensates for the increased variation from quantum confinement effect. Interestingly, by considering both Fin LER and LG variations, both devices show similar sensitivity to variation. We conclude that tighter control of Fin LER in In 0.53Ga 0.47As together with improved short channel immunity will make III-VFINFETs a promising device for 0.5V and below logic applications.
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U2 - 10.1109/DRC.2012.6256968
DO - 10.1109/DRC.2012.6256968
M3 - Conference contribution
AN - SCOPUS:84866925602
SN - 9781467311618
T3 - Device Research Conference - Conference Digest, DRC
SP - 231
EP - 232
BT - 70th Device Research Conference, DRC 2012 - Conference Digest
T2 - 70th Device Research Conference, DRC 2012
Y2 - 18 June 2012 through 20 June 2012
ER -