X-ray and neutron porosimetry as powerful methodologies for determining structural characteristics of porous low-k thin films

  • Hae Jeong Lee
  • , Bryan D. Vogt
  • , Christopher L. Soles
  • , Da Wei Liu
  • , Barry J. Bauer
  • , Wen Li Wu
  • , Eric K. Lin
  • , Gwi Gwon Kang
  • , Min Jin Ko

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

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