X-ray and neutron porosimetry as powerful methodologies for determining structural characteristics of porous low-k thin films
- Hae Jeong Lee
- , Bryan D. Vogt
- , Christopher L. Soles
- , Da Wei Liu
- , Barry J. Bauer
- , Wen Li Wu
- , Eric K. Lin
- , Gwi Gwon Kang
- , Min Jin Ko
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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