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X-ray and neutron porosimetry as powerful methodologies for determining structural characteristics of porous low-k thin films
Hae Jeong Lee, Bryan D. Vogt, Christopher L. Soles, Da Wei Liu, Barry J. Bauer, Wen Li Wu, Eric K. Lin, Gwi Gwon Kang, Min Jin Ko
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
5
Scopus
citations