Z-microscopy for parallel axial imaging with micro mirror array

We propose and demonstrate a method of z-microscopy by utilizing an array of 45°-tilted micro mirrors arranged along the axial direction. Image signals emitted from different axial positions can be orthogonally reflected by the corresponding micro mirrors and spatially separated for parallel detection, essentially converting the more challenging axial imaging to a lateral imaging problem. Each micro mirror also provides optical sectioning capability due to its finite dimension. Numerical analysis shows that nearly diffraction limited axial resolution can be achieved. Experimental demonstration of z-imaging of fluorescent microspheres is also presented.