@inproceedings{bce9ec83d03349c79911fea0451fe4ed,
title = "ZnO thin film transistors for more than just displays",
abstract = "We have fabricated ZnO thin film transistors (TFTs) on rigid and flexible substrates with characteristics well suited for displays and more general microelectronic applications. Using weak-reactant plasma enhanced atomic layer deposition (PEALD) we have fabricated single-gate, double-gate, and trilayer ZnO TFTs with good performance and stability. We have also fabricated TFTs and circuits on thin (few μm thick) solution-cast polymeric substrates that can be flexed to small radius for thousands of cycles.",
author = "Li, {Haoyu U.} and Ramirez, {J. Israel} and Sun, {Kaige G.} and Yiyang Gong and Li, {Yuanyuan V.} and Jackson, {Thomas N.}",
year = "2015",
month = feb,
day = "16",
doi = "10.1109/IEDM.2015.7409736",
language = "English (US)",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "19.6.1--19.6.4",
booktitle = "2015 IEEE International Electron Devices Meeting, IEDM 2015",
address = "United States",
note = "61st IEEE International Electron Devices Meeting, IEDM 2015 ; Conference date: 07-12-2015 Through 09-12-2015",
}